Denton Vacuum published an article explaining why the Broad IBE approach used in its Infinity FA suits full chip delayering better than RIE, FIB, mechanical polishing, or chemical etching.

Denton Vacuum enables innovation. From basic research to manufacturing—Denton Vacuum provides thin film deposition technology that delivers consistent, repeatable results through wide-process capability, ease-of-use, superior reliability, and global service and support. Denton Vacuum’s thin film deposition technologies provide superior performance in such applications as precision optics, lift-off & step coverage, dual-sided laser facet coating, indium for wafer level packaging, diamond-like carbon, metallization and medical coatings.