Heidelberg Instruments will showcase parallelized multi-tip thermal scanning probe lithography (t-SPL) at Eurosensors 2026 in Zurich.

Heidelberg Instruments is a world leader in the design, development, and manufacture of high-precision laser lithography systems, maskless aligners, and nanofabrication tools. Industry stakeholders as well as working groups of the most renowned universities and research institutes all over the world use Heidelberg Instruments systems for the advanced micro- and nanopatterning. Fields of applications are in micro-optics and microsystems technology, photonics, electronics, semiconductors/advanced packaging, quantum computing, MEMS/NEMS, micro-mechanics, biomedical engineering, 2D material, IoT and many more. With 40 years of experience and well over 1,500 systems installed worldwide, Heidelberg Instruments provides lithography solutions specifically tailored to meet the micro- and nanofabrication requirements of our global customers – no matter how challenging. In our Process and Application Labs (PAL) located in Germany, Switzerland and China, the engineers train and collaborate closely with our customers to make the most of their Heidelberg Instruments equipment. The Heidelberg Instruments technology portfolio comprises high-precision Maskless Laser Lithography (MLA) systems for the direct writing of 2D and 2.5D microstructures, mask-making, and advanced laser lithography applications. Complementing this, our NanoFrazor based on Thermal Scanning Probe Lithography (t-SPL) enables cutting-edge nanopatterning with unparalleled precision. Together, these technologies form the foundation of Heidelberg Instruments' core expertise in micro- and nanofabrication. Heidelberg Instruments is part of Lab14, a group of successful high-tech companies providing advanced manufacturing solutions with complementary products and services for a wide range of applications that require demanding solutions for nano- and microfabrication and surface analysis. View our privacy policy: https://heidelberg-instruments.com/data-protection

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