imec demonstrated the feasibility of patterning tight-pitch random logic structures using a CAR-based single-print High NA EUV lithography step at the 2026 SPIE Photomask Technology + EUV Lithography Conference.
Published
Signal category
Presence & Recognition
Quote
“At the 2026 SPIE Photomask Technology + EUV Lithography Conference, imec demonstrates the feasibility of patterning tight-pitch random logic structures using a CAR-based single-print High NA EUV lithography step.”
— imec team
Company
imec
Imec is a world-leading R&D and innovation hub in nanoelectronics and digital technologies.
- Industry
- Research Services
- Location
- Leuven, BE
- Company size
- 4,946 employees
At imec, we shape the future by enabling nano- and digital technology innovation that enhances quality of life, together with partners from the industry, government, and academia. Since 1984, imec quickly made its name as the leading research hub for advanced CMOS scaling and continues to set the course for the semiconductor industry. Our expertise combines deep-tech with software and systems, unlocking smart, sustainable solutions in fields like healthcare, mobility, Industry 5.0, clean energy and agrifood. Ready to join us? Explore our R&D, start-up support, and career opportunities at imec-int.com.
Founded 1984