LayTec used EpiTT for real-time reflectance monitoring during MOCVD growth processes
Published
Signal category
Technology & Infrastructure
Quote
“A key part of the process development was real-time reflectance monitoring with LayTec’s EpiTT”
— LayTec team
Company
LayTec
Knowledge is key
- Industry
- Semiconductor Manufacturing
- Location
- Berlin, DE
- Company size
- 57 employees
LayTec is a major provider of integrated optical metrology systems for thin-film processes in the compound semiconductor and photovoltaics industry. LayTec sensors are used in a broad range of thin-film applications such as compound semiconductor epitaxy, photovoltaic, oxide and organic deposition. Advanced use of measurement techniques such as reflectometry, emissivity corrected pyrometry, laser deflectometry, reflectance anisotropy spectroscopy are uniquely combined to create our series of novel products. LayTec’s in-situ metrology provides access to all key thin-film parameters in real-time – either during the deposition process or in-line.
Founded 1999