Physical Electronics published a spotlight article exploring how angle-resolved XPS and angle-resolved hard X-ray photoelectron spectroscopy reveal changes at the buried Si/SiOₓ/Al₂O₃ interface during post-annealing treatments.
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Revealing Hidden Interface Changes in Si/SiOₓ/Al₂O₃ Stacks with AR-HAXPES As semiconductor devices continue to scale and become more complex, understanding buried interf…
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Physical Electronics
Physical Electronics, a subsidiary of ULVAC-PHI, the world's leading supplier of UHV surface analysis instrumentation.
- Industry
- Research Services
- Location
- Chanhassen, US
- Company size
- 51–200 employees
About Physical Electronics
Physical Electronics is a subsidiary of ULVAC-PHI, the world's leading supplier of UHV surface analysis instrumentation used for research and development of advanced materials. Fields of application for our products include: nanotechnology, microelectronics, photovoltaics, data storage, bio-materials and catalysis. PHI's innovative XPS, AES and TOF-SIMS technologies provide our customers with unique tools to solve challenging materials problems and accelerate the development of new materials and products. For more information visit our website at www.phi.com.
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